摘要
研究了移相式红外泰曼 格林干涉仪,研制出光机电算一体化的仪器,仪器孔径为Φ30mm。编制了计算机软件,用于干涉图波面的拟合与红外光学系统成像质量的评价,所编软件与国际上同类软件的计算精度相当。介绍了红外干涉仪的多种应用:评价红外光学系统的像质,检测光学件精磨表面粗糙度、光盘基片面形的平整度。结果表明,仪器干涉系统光学质量优于λ/25,扩展不确定度优于λ/130,重复性优于λ/200(λ=10.6μm)。
The design of infrared phase\|shifting Twyman\|Green interferometer is described. An automatic phase\|shifting infrared interferometer whose aperture is Φ30 mm is developed. The computer software is programmed to fit the wavefront and evaluate the imaging quality of infrared optical system. The calculation accuracy of software equals to the similar softwares in the world. Several kinds of application of infrared interferometer--the quality of infrared optical system,the roughness of ground glass and the flatness of compact disk are reseached. The result show, the optical quality of the interferometric system is better than λ/25, the extended accuracy is better than λ/130, and the precision is better than λ/200(λ=10.6 μm).
出处
《红外与激光工程》
EI
CSCD
北大核心
2003年第4期335-338,381,共5页
Infrared and Laser Engineering
基金
国防科学技术工业委员会资助项目(J181999B001)
关键词
红外干涉仪
波面拟合
干涉检验
Infrared interferometer
Wavefront fitting
Interferometric test
