摘要
从干涉计量术方面对自行研制的移相式ＣＯ２红外激光干涉仪进行了研究并提供了精确定位红外光路的调试技术，应用该干涉仪对红外光学元件及系统进行了测量；最后，对本干涉仪的系统误差作了测试和分析。结果表明，本仪器系统误差优于λ／２０（λ＝１０．６μｍ）．
This paper does some researches on the self-developed phase--shifting CO2 infrared interferometer from the aspect of interferometry,and provides a technique which is used to aligninfrared interferometer precisely. Measurements of infrared components and systems are taken on this infrared interferometer. Finally,the system error of the infrared interferometer ismeasured and analysed,which is better than A/20 (λ=10. 6μm) as shown in results.
出处
《光学精密工程》
EI
CAS
CSCD
1996年第2期98-102,共5页
Optics and Precision Engineering
关键词
红外
干涉仪
移相干涉术
Infrared interferometer, Phase--shifting interferometry
