摘要
本文研究了使用电阻丝加热的MOCVD反应管中加热器的控制技术,报道了具有通用性的自动限流控制电路工作原理及其调试方法.本技术主要适用于高电阻温度系数加热元件的控制及保护,已成功地应用于MOCVD反应管中高温控制,加热器的使用寿命得到了显著提高.
We studied the control technique of resistance wire heater in metal-organic chemical vapor deposition reactor,and reported the operation principle and the regulating method of the circuit using the Auto-Current-Limit technique in this paper.This technique is effective to control and safeguard the heater of high resistance coefficient depending on temperature.It has been used with good result to control the super-high temperature of the susceptor in MOCVD reactor,and the lifetime of the heater is prolonged.
出处
《南昌大学学报（工科版）》
CAS
2003年第2期55-58,共4页
Journal of Nanchang University(Engineering & Technology)
关键词
电阻温度系数
加热器
自动限流
resistance wire heater
resistance coefficient depending on temperature
Auto-Current-Limit
