摘要
采用顺序耦合法 ,对光开关中的、静电驱动的悬臂梁进行分析 ,得出了悬臂梁的动态响应特性 ,并指出了空气阻尼对器件性能的影响 。
In the article a sequence coupling method is used for the analysis of a cantilever beam in an optical switch , which is drived by electrostatic force. From the analysis , the dynamic character of the beam has been gained, that pointing out the influence of air damping. The method is a powerful method for designing sensors of Micro Electronics Mechanical System(MEMS).
出处
《光学仪器》
2003年第3期17-20,共4页
Optical Instruments
基金
国家自然科学基金项目 ( 5 0 2 75 12 7)
