摘要
介绍了硅尖的制备及其在传感器技术中的应用。硅尖的制备方法可与现代IC工艺兼容且易削尖,故比其它材料微尖更实用。硅尖的应用随着制备工艺的改进与其它相关技术的进步必将得到新的开发。
Fabrication of silicon tip is described.Then the ap pl ication of silicon tip in sensor technology is summarized.The method of fabricat ion of silicon tip is compatible with modern IC processing,in addition to the si licon tip can be easy to sharp,it is practical than other materials.It is believ ed that the application of silicon tip would be developed with the improvement o f fabrication technology and other correlation technology.
出处
《传感器技术》
CSCD
北大核心
2003年第6期58-61,共4页
Journal of Transducer Technology
基金
福建省自然科学基金(A0110003)
福建省科技计划重点项目(2002H022)
关键词
硅尖
刻蚀
微加工技术
传感器
silicon tip
etch
micromachined t echnology
sensor
