摘要
根据大面积离子束辅助沉积MgO薄膜的需要 ,本文研究了具有并行阳极结构的宽束矩形冷阴极潘宁离子源。在简要说明冷阴极潘宁离子源基本原理的基础上 ,分析了在设计宽束矩形的离子源中主要考虑的问题 ,并给出初步的实验结果。
A cold cathode ion source that emits broad rectangle ion beam with multianode was investigated in order to meet the requirements for depositing MgO films on PDP screen with ion source assisted deposition (IAD).By a brief description of the principle of PIG cold cathode ion source,the main problems encountered during designing the ion source were analyzed,and the initial results were presented.
出处
《真空电子技术》
2003年第2期57-59,共3页
Vacuum Electronics
