摘要
用粉末冶金方法制造难熔金属钨硅化物,研究自传播高温合成技术制取钨硅的包复粉末,讨论了它的制造工艺参数及其理化性能的测定。制造出了高纯度的难熔金属钨硅化物溅射靶材,为国产系列溅射靶材增添了新品种。
A review is given in the present paper of the production of coated powders of tungsten silicide by the P/M route using the self-propagation and high temperature synthesis techniques. The measurement of physical and chemical properties of the tungsten silicide is introduced, giving emphasis to the high purity sputtering target thus made. The production success is an indication that this type of target alloy is now available locally.
出处
《机械工程材料》
CAS
CSCD
1992年第2期41-44,共4页
Materials For Mechanical Engineering
