摘要
一种用于紫外多层膜反射率测量的样品台 ,由步进电机驱动 .其构成由三个部分 :机械系统 ,计算机控制系统 ,单片机控制系统 .最后对极紫外多层膜进行了测量 ,结果显示该系统满足使用要求 。
A platform is introduced to measure the reflectivity of multiplayer films in EUV band. Three main composing parts are mechanical system, computer controlling system and micro processing unit system. The experimental results indicate that the system meets the application requirement and works reliably.
出处
《测试技术学报》
2003年第2期138-140,共3页
Journal of Test and Measurement Technology
