摘要
利用半导体激光器线性调频技术制成了新型的外差干涉仪。分析了干涉仪的测量原理、动态范围及精确度,测量了压电陶瓷的电压-位移曲线。
A prototype heterodyne interferometer is made using frequency-modnlated diode laser. This paper analyses the principle, dynamic range and resolution of the measurement of this interferometer. The displacement of PZT versus voltage applied to it has been measured.
出处
《计量学报》
CSCD
1989年第1期18-23,共6页
Acta Metrologica Sinica
