摘要
介绍一种以线性调频半导体激光为光源的衍射光栅干涉仪。激光与光栅上衍射的±１级衍射波会合，由于有光程差而发生光拍频，测量拍频信号的相位移则可测得光栅的位移。设计了一种克服激光波长漂移和空气折射率变化影响的对称差动光路，使这种方法达到实用化的程度，分辨力达到纳米级。此外，还介绍了应用于接触干涉仪的实验情况。
Introduces a new measurment method. As the laser from LD incidents on the diffraction grating and ±1 order diffraction beams are interfered, if the interferometer has the optical path difference, the optical beat frequency will appear. Measuring phase of beat signal, the displacement of grating will be obtained. For reducing shift as frequency of LD and refractive index of air is changed, a differential optical system is presented. The measurement resolution of this method get the better of 10 nm. Also describes the experiments and conclusion.
出处
《宇航计测技术》
CSCD
1998年第4期24-28,40,共6页
Journal of Astronautic Metrology and Measurement
关键词
衍射光栅
激光
干涉仪
半导体激光器
位移测量
Diffraction grating Laser interferometer Semiconductor laser Displacement measurement
