摘要
分析了微型机电系统中产生的一系列特殊效应 ,介绍了微机电系统中新的设计理论和设计方法 。
A series of special effects produced in micro electro-mechanical system was analyzed.New designing theory and designing method in micro electro-mechanical system were introduced in order to set up theoretical system of micromechanics.
出处
《机械设计》
CSCD
北大核心
2003年第4期6-8,共3页
Journal of Machine Design
