摘要
本文综述了金刚石薄膜(DTF)研究的最新进展,着重分析了金刚石薄膜的制备方法、成膜机理和各种性能表征技术。最后将金刚石薄膜和类金刚石薄膜进行了简单比较。
This paper reviews state-of-the-art research progress of Diamond Thin Film (DTF) with emphasis on their preparation methods, growth mechanism and various properties characterizing techniques. At the end the comparison between Diamond Coatings and Diamond-like Coatings have been given.
出处
《激光与红外》
CAS
CSCD
北大核心
1989年第6期18-22,17,共6页
Laser & Infrared
