摘要
本文描述了金刚石的电学性能与作为半导体材料的应用前景,介绍了半导体金刚石研究及其器件的发展动态,评述了半导体金刚石合成、掺杂和器件制作中存在的技术问题,指出今后应用研究中需要解决的问题.
In this paper, the electrical properties of diamond and application prospect of semiconductive diamond materials are described. The recent development of semiconductive diamond is introduced. The problems of synthesis, doping and product-making of semiconductive diamond are reviewed. The future trend of development of the diamond semiconductors is also put forward.
出处
《硅酸盐通报》
CAS
CSCD
北大核心
1992年第6期46-51,共6页
Bulletin of the Chinese Ceramic Society
关键词
金刚石
离子注入
电性
半导体
diamond
semicondutor
electrical properties
doping
ion implantation
