摘要
微机电系统是一个新兴的技术领域.阐述了微机电系统的特点、加工工艺、应用及其现状和发展趋势.
MEMS( Micro Electro Mechanical System) is an emerging technology. Its technical features, processing technique, application, development prospects and trends are discussed in this paper.
出处
《泰安师专学报》
2002年第6期56-58,共3页
Journal of Taian Teachers College
