摘要
本文介绍了离子束溅射镀膜原理,对淀积束率与离子能量、束流密度的关系进行了实验研究。实验结果与理论分析有较好的一致性。
In this paper, the principles of ion beam sputtering coating are discused. The experimental results on the relationship between the deposition rate and the ion energy and the dencity of ion beam current are reported, which are consistent with the theoritical analyses.
出处
《光学技术》
CAS
CSCD
1992年第6期6-8,共3页
Optical Technique
