摘要
本文简单地介绍了超半球透镜减反射膜膜厚分布的理论计算结果。通过调节蒸发源与基片间的相对位置和“散乱”淀积技术获得了与理论要求基本一致的膜厚分布。通过离子轰击、基板烘烤和热处理获得了满意的膜层牢固度。
The theoretical thickness distributions of the AR coatings on the super-hermisperical lenses have been calculated. The experimenital results of the thickness distributions by means of adjusting arrangement between the sample and the evaporation source and 'scattering' deposition technique are in agreement with the theoretical ones. Using heating substrate, glow discharge and thermal treatment after deposition, the durability of coatings is also very robust.
出处
《光学技术》
CAS
CSCD
1992年第5期32-35,31,共5页
Optical Technique
