摘要
本文探讨了利用衍射仪几何偏心误差测定各种表面膜厚度的方法。在日本理学公司生产的D/max—ⅢCX射线衍射仪上的实施与研究表明,在理想情况下,峰位移法的灵敏度为0.002°/μm,检测限可达2μm,但重现性较差。为克服这一缺点,本文提出了改进方法。
This paper discussed how to measure the thickness of various surface films using eccentricity of X—ray diffractometer. Study and practice with a D/max Ⅲ C X—ray diffractometer shows that on an ideal condition the sensitivity of the peak shift comes up to 0. 002°/μm and the limit of measurement 2μm, but the reproductivity is not good. To overcome this disadvantage proper counter measures have been proposed in the paper.
出处
《钢铁研究》
CAS
1992年第5期26-30,共5页
Research on Iron and Steel
关键词
X射线
测量
涂层
镀层
沉淀层
thickness measurement by X—ray
coating
plating
deposited layer
diffraction
