摘要
根据压电致动的工作原理,建立了圆片微驱动装置的压电复合层薄板的机电耦合力学模型;应用弹性薄板的小挠度弯曲理论,推导出圆形压电复合层薄板的弹性曲面微分方程,提出由逆压电效应引起的平面应变可以等效为作用在压电复合层薄板上的横向荷载的设计方法;指出等效横向荷载取决于平行板电容器的边缘电场分布.推导了压电复合层薄板中性面的表达式.在求电场的超越方程数值解的基础上,建立了微驱动装置的有限元结构模型,并对某微泵驱动装置进行了计算仿真,得到令人满意的结果.
An electromechanicalcoupled mechanics model is established for the circleflake microactuator, which is based on the working principle of piezoelectricity. By using the elastic thin plate bending theory with small deflection, we derive some differential equations for the elastic curved surface in circular piezoelectric composite laminates and present an analysis and design method in which piezoelectric patchs radial strain induced by the inverse piezoelectric effect is equivalently substituted with transverse stress on piezoelectric composite laminates. It is pointed out that the equivalent transverse load depends on the edge electric field distribution of the parallel plate capacitor. The expression for the neutral plane in the piezoelectric composite laminates is derived. On obtaining the numerical solution of the transcendental equation for the electric field, a finite element structural model for the micro actuator is developed. Finally a static analysis of the model of the micropump is simulated with satisfactory results.
出处
《西安电子科技大学学报》
EI
CAS
CSCD
北大核心
2003年第1期42-46,共5页
Journal of Xidian University
基金
陕西省自然科学基金资助项目(99C05)
