摘要
本文提出了应用扫描隧道显微镜(STM)纳米云纹法的测量面内位移的原理.测量中,扫描隧道显微镜的探针扫描线作为参考栅,物质原子晶格栅结构作为试件栅,由这两组栅线干涉形成云纹进行纳米级变形测量.同时,利用PZT控制载物台使试件沿栅线的垂直方向移动,来实现从0到2π的四步相移.文中对扫描隧道显微镜纳米云纹的形成原理和测量方法以及相移技术进行了详尽的讨论.并运用该方法对高纯定向裂解石墨(HOPG)的纳米级变形虚应变进行了测量研究.
In this paper, a new STM nanomoiré method for measuring nanometerdeformation was proposed. In the measurement, the moiré pattern is generated by the scanning lines of scanning tunneling microscope and the atomic lattice of substance as a specimen grating. At the same time, Phase shifting was realized in four steps from 0 to 2π by controlling the PZT in the STM system to shift the specimen in the direction perpendicular to the gratings. The principles of forming STM nano moiré, experimental techniques and phase shifting were described in detail in this paper. Nanodeformation virtual strain of high orientated pyrolytic graphite(HOPG) was measured by using of this method.
出处
《实验力学》
CSCD
北大核心
2002年第4期398-402,共5页
Journal of Experimental Mechanics
关键词
扫描隧道显微镜
ST)
纳米云纹
纳米测量
晶体光栅
相移
scanning tunneling microscope(STM)
nano- moiré
nano-metrology
crystal lattice
phase shifting
