摘要
通过采用预氧化、氮势控制、扩散期通入高纯氮气以及退氮处理等多种手段,在保证渗氮层质量的前提下缩短了气体渗氮的周期,由原来的50小时降低到35小时左右。
A rapid gasnitridation technology has been developed through some technological measures such as the preoxydization, the control of the amount of nitride, the inlet of high purity nitride in the difusion period, and the denitridation, etc, the nitrisation time of which was shortened from 50 hours to 35 hours.
出处
《辽宁工学院学报》
2002年第6期34-36,共3页
Journal of Liaoning Institute of Technology(Natural Science Edition)