摘要
本文报道用SEM、EDS和IPS联机方式,对扩散阴极用的多孔钨体和钪酸盐阴极进行显微观察分析。研究采用浸铜多孔钨体制做试样;用SEM的背射电子象做分析用图象;用IPS具有的图象处理及分析功能对多孔钨体中孔隙的空间分布特征及孔隙大小及形状的分布特征进行了定量分析。同时考查了钪酸盐阴极中Sc、Ba、Al、Ca诸元素的分布情况。研究认为,改进多孔钨体结构的均匀性是提高扩散阴极性能的可能途径之一。
This article deals with the porous tungsten body and scandate cathode by SEM,EDS and IPS (Image Process-ing System) on line mode and calculates the porosity of porous tungstens, the diameter of area-equivlent circle and circular shape factor of pores, also analyses the d isbution of active elememts such as Sc,Ba,A1,Ca in the pores of scandate cathode, a possible appoach to improving the emisssion function of cathode has been found by eommennc- ing on inproving the structure evenness of porous of porous tungsten body.
出处
《电子显微学报》
CAS
CSCD
1992年第2期109-113,共5页
Journal of Chinese Electron Microscopy Society
关键词
扫描电镜
图象分析仪
能谱仪
阴极
Image processing system
SEM
EDS
Porous tungstem
Scandate cathode
