摘要
本文简要报导用Philips—SEM505、日本ANELAL公司AES—430S以及美EDAX—9100对钪酸盐阴极及多孔钨体的形貌结构、发射表面和体内的成分组成等进行实验研究的初步结果。实验表明:钨粉种类、成形方法、精加工方式等都是对多孔钨体和阴极表面性能有直接影响的因素。用俄歇谱仪对阴极发射面做纵向剖面分析可以看出,决定阴极性能的发射表面的“浅层”是发射活性物质最富集的区域。随着深度的增加,活性物质逐渐减少。深度超过约420A以后,各种成分便呈相对稳定的分布。因此,阴极性能的优劣主要取决于极薄一层发射表面的组成和性质。对该层的结构、性能等做充分的研究,对了解阴极的发射机理、改善并掌握稳定的阴极制备工艺都是十分重要的。
This paper reports briefly the results of experiments on electron emission material (Scandate cathode), its
emisson surface and bulk composition and the microstructure of porous tungsten etc by means of philips SEM-505 (Nether lands) ANELAL AES-430S (Japan) and EDAX-9100 (U.S.A) Experiments show that the species of tungsten powder used, the forming method employed and the pre-cise treatment given are factors directly cffecting the shape of porous tungsten and characteristics of cathodeemission surface.The results of Layer by Layer detection of the cathode emission surface by means of the AES show that the thin Layer of the cathode emission surface within the range of 420A is most densely populated. With the increase of depth, the active substance gradually reduces until about 420 A where the various elements exhibit a relatively steady state with no apparent changes.
出处
《电子显微学报》
CAS
CSCD
1990年第1期41-47,共7页
Journal of Chinese Electron Microscopy Society
