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尘埃粒子的半导体激光散射测量 被引量:26

Aerosol Particle Measurement by Laser Diode Light Scattering
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摘要 以半导体激光为光源 ,建立了一个可以实时测量空气中尘埃粒子的尺寸与颗粒数浓度的光学系统。根据Mie散射理论 ,计算了该光学系统的光散射响应特性。实验结果表明 ,该系统具有高的计数准确度、计数效率和计数重复性 ,适用于洁净度检测和环境空气中尘埃粒子的粒径分布测量。 A laser-diode based optical system which can measure aerosol particle size and concentration was described. The light scattering response characteristics of the system were calculated, based on Mie light scattering theory. The experimental results show that the system has high counting accuracy, efficiency and reproducibility. The system is suitable for verification of cleanliness class and measurement of ambient aerosol size distribution.
出处 《中国激光》 EI CAS CSCD 北大核心 2002年第12期1117-1121,共5页 Chinese Journal of Lasers
关键词 尘埃粒子 半导体激光 散射测量 光散射 Aerosols Light scattering Optical variables measurement Particle size analysis Semiconductor lasers
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