摘要
电子工业中半导体晶圆芯片与光伏电池等产品的生产过程会产生大量含氟废水,流化床结晶(FBC)技术提供了一种可持续解决方案,回收废水中氟化物以实现电子工业废水的近零排放。FBC是一种利用结晶学原理的连续流固-液分离系统,通过控制溶液中离子过饱和度,使离子对在悬浮颗粒表面结晶并产出可回收的晶体产品。半导体废水来源多样、成分复杂,对结晶过程有不同影响,秉持具体问题具体分析的原则,论文梳理了半导体生产过程中的各类废水性质以及杂质对共结晶的作用。FBC的运行逻辑涵盖流体动力学、晶体成核及生长动力学,工艺参数的调控对整体效能至关重要,FBC技术的推广应聚焦于复杂进水工况的应对策略,并寻求与其他工艺集成以融入循环经济框架。
The production of semiconductor wafers and photovoltaic cells in the electronics industry generates large amounts of fluoride-containing wastewater.Fluidized bed crystallization(FBC)technology offers a sustainable solution for recovering fluoride from wastewater,enabling zero liquid discharge of wastewater.FBC is a continuous-flow solid-liquid separation system based on crystallization principles.By controlling the ion supersaturation in the solution,ion pairs crystallize on the surface of suspended particles,producing recoverable crystalline products.Adhering to the principle of analyzing specific issues on a case-by-case basis,the diverse sources and complex composition of semiconductor wastewater have varying effects on crystallization.Therefore,the properties of various types of wastewater generated during semiconductor production and the role of co-crystallization of impurities have been analyzed.The operational logic of the FBC encompasses fluid dynamics,crystal nucleation,and growth kinetics,the regulation of process parameters is critical to overall efficiency.Promoting FBC technology should focus on strategies that address intricate influent conditions and integrate with other processes to align with the circular economy framework.
作者
梁栋
孔爱华
王彪
刘涛
邢美燕
LIANG Dong;KONG Aihua;WANG Biao;LIU Tao;XING Meiyan(College of Environmental Science and Engineering,Tongji University,Shanghai 200092,China;Qixia Environmental Monitoring Center,Yantai 265300,China;Jize Environmental Protection Technology(Shanghai)Co.,Ltd.,Shanghai 200080,China)
出处
《水处理技术》
北大核心
2026年第3期1-8,共8页
Technology of Water Treatment
基金
同济大学“双带头人”教师党支部书记学术能力提升计划(0400219423)
国家自然科学基金资助面上项目(51679168)。
关键词
流化床
结晶
含氟废水
半导体
零液体排放
fluidized bed
crystallization
fluoride-containing wastewater
semiconductors
zero liquid discharge
