摘要
针对多晶硅生产过程中氯硅烷渣浆处理效率低、高沸物难以回收的难题,本研究提出了一种结合干燥法与高沸物催化转化技术的综合处理方案。通过分析渣浆来源及组分,设计了包含干燥系统、高沸物提馏与催化转化系统的工艺流程。干燥系统通过固液分离实现氯硅烷高效回收,而高沸物转化系统在催化剂作用下,将聚合氯硅烷裂解为三氯氢硅、四氯化硅等可回用原料,转化率达95%以上。深度融合技术进一步优化了金属杂质去除与资源化路径,解决了传统方法能耗高、二次污染等问题。实践表明,该技术不仅显著降低了废渣排放,还实现了氯硅烷和高沸物的闭环利用,使多晶硅生产迈向绿色循环经济模式,兼具环保效益与经济效益,为行业提供了可推广的高效解决方案。
To address the challenges of low treatment efficiency in chlorosilane slurry and difficult recovery of highboiling polymers during polysilicon production,an integrated solution combining drying technology with catalytic conversion of high-boiling substances was proposed.By analyzing the sources and components of the slurry,a process flow integrating a drying system with a rectification and catalytic conversion system for high-boiling substances was designed.The drying system achieved efficient chlorosilane recovery through solid-liquid separation,while the high-boiling polymer conversion system decomposed polymerized chlorosilanes into reusable raw materials such as trichlorosilane and silicon tetrachloride under catalyst action,achieving a conversion rate exceeding 95%.Deep integration technology further optimized metal impurity removal and resource utilization pathwayd,resolving traditional issues of high energy consumption and secondary pollution.Practical applications demonstrated that this technology not only significantly reduced waste residue emissions but also realized closed-loop utilization of chlorosilanes and high-boiling polymers,advancing polysilicon production toward a green circular economy model.This solution delivered both environmental and economic benefits,providing an industry-wide scalable and efficient approach that addresses critical technical bottlenecks in sustainable manufacturing.
作者
高明
刘志威
GAO Ming;LIU Zhiwei(Xinjiang DAQO New Energy Co.,Ltd.,Xinjiang Shihezi 832000,China)
出处
《广州化工》
2026年第2期166-168,共3页
GuangZhou Chemical Industry
关键词
多晶硅
渣浆处理
高沸物转化
氯硅烷回收
polycrystalline silicon
slurry treatment
high boiling point conversion
chlorosilane recovery
