摘要
本文采用水热法制备SnO_(2)纳米材料,并将其用作微机电系统(Micro-Electro-Mechanical Systems,MEMS)氢气传感器的热敏材料涂层。同时,借助微机电系统制备硅基电极基底,以提高传感器敏感性。最后,检验MEMS氢气传感器。研究结果表明,MEMS传感器能适应10~100ppm不同浓度的氢气,在最佳工作温度下的氢气响应时间不超过30s,响应曲线走向无较大起伏点,应用效果和稳定性明显。
This article is based on the hydrothermal method to prepare SnO_(2)nanomaterials as thermal sensitive material coatings for hydrogen sensors in Micro Electro Mechanical Systems(MEMS).At the same time,silicon-based electrode substrates are prepared using microelectromechanical systems to improve sensor sensitivity.In addition,verify MEMS hydrogen sensors.The research results indicate that MEMS sensors can adapt to different concentrations of hydrogen gas ranging from 10 to 100 ppm.The hydrogen response time at the optimal operating temperature does not exceed 30 seconds,and the response curve has no significant fluctuations.The application effect and stability are obvious.
作者
刘馨璐
LIU Xinlu(Sinopec Marketing Research Institute of Applied Technology,Research Management Department,Tianjin 300380)
出处
《中国科技纵横》
2025年第21期74-76,共3页
China Science & Technology Overview
