摘要
传统的微电子机械系统(Micro-Electro-Mechanical Systems,MEMS)锚区结构一般通过设定释放腐蚀时间控制释放腐蚀停止边界。为了实现锚区尺寸精确控制,文章设计了一种带有释放停止层的新型MEMS锚区结构,并在硅麦克风中应用验证。硅麦克风设计中同时包含传统和该新型MEMS锚区结构,对两种锚区结构进行分析对比,结果表明,该新型MEMS锚区结构可实现锚区尺寸精确控制。进一步将硅麦克风MEMS芯片与专用集成电路(Application-Specific Integrated Circuit,ASIC)芯片合封,形成硅麦克风成品,通过跌落及滚筒试验验证成品可靠性,试验前后所有样品灵敏度变化均小于1 dBV,结果表明,该新型MEMS锚区结构可靠性好,适用于硅麦克风等MEMS传感器。
Generally,the etching stop boundaries of traditional MEMS anchor structures are controlled by setting the release etching time.To achieve accurate control of anchor dimensions,a novel MEMS anchor structure with release stop layers were designed in the paper and applied in silicon microphone.The silicon microphone design included both the traditional and the novel MEMS anchor structures.The two kinds of anchor structures were analyzed and compared.The results show that the novel MEMS anchor structure enables precise dimensional control of the anchor.Furthermore,the MEMS chip of the silicon microphone was packaged with the ASIC chip to form the final silicon microphone product.The reliability of the device was verified through drop and tumbling tests.The sensitivity variation of all samples before and after the tests was less than 1 dBV,indicating the high reliability of the novel MEMS anchor structure.The proposed structure is wellsuited for MEMS sensors such as silicon microphones.
作者
赵成龙
端木正
ZHAO Chenglong;DUANMU Zheng(Wuxi Willmems Semiconductor Co.,Ltd.,Wuxi 214028,China;School of Instrument Science and Opto-Electronics Engineering of Beijing Information Science and Technology University,Beijing 100192,China)
出处
《传感器世界》
2025年第11期20-25,共6页
Sensor World
