摘要
隧穿氧化层钝化接触(TOPCon)电池已逐渐成为市场主流,但在组件投产过程中会出现电池片内电致发光(EL)明暗不良。实验表明,沉积腔室温度场的不均匀会导致生长的隧穿氧化层和多晶硅(Poly-Si)膜层的厚薄差异,在偏薄的区域磷会向硅基体内扩严重导致俄歇复合增多,电池的开路电压和转换效率下降,组件投产会出现电池片内EL明暗。提高沉积腔室温度场均匀性能有效改善,同时配备光致发光(PL)检测仪能有效避免检验漏失。
Tunnel oxide passivated contact(TOPCon)batteries have gradually become the mainstream in the market,but poor electroluminescence(EL)brightness and darkness in the cell will occur during the production process of the components.Experiments have shown that the unevenness of the temperature field in the deposition chamber will lead to the difference in the thickness of the tunnel oxide layer and the poly-silicon(Poly-Si)film layer grown.In the thin area,phosphorus will expand into the silicon substrate and seriously lead to the increase of Auger recombination.,the open-circuit voltage and conversion efficiency of the battery decrease,and EL brightness and darkness will appear in the cell when the module is put into production.Improve the uniformity of the temperature field in the deposition chamber,and effectively improve the uniformity of the temperature field,and equip a photoluminescence(PL)detector to effectively avoid inspection leaks.
出处
《科技创新与应用》
2025年第33期50-52,56,共4页
Technology Innovation and Application
关键词
隧穿氧化层
电池明暗
沉积温度
多晶硅膜层
俄歇复合
tunnel oxide
brightness and darkness in the cell
deposition temperature
poly-silicon(Poly-Si)film layer
Auger recombination
