摘要
白光扫描干涉技术是一种高精度、非接触式的三维测量方法,但在大行程扫描和复杂测量环境下易受到振动和非线性扫描误差影响,导致采样信号呈现非均匀分布,从而降低传统拟合算法的稳定性与计算效率。文章针对非均匀采样带来的信号畸变问题,提出了一种基于感兴趣区域(ROI)分段的傅里叶级数拟合优化方法。方法首先通过粗略峰值定位快速确定干涉信号的有效区域,剔除无效背景区段,并结合多线程并行计算策略对信号进行分段拟合与重构,有效降低了拟合阶数与计算开销。仿真结果表明,该方法在保证重构精度的同时,计算效率显著提升。在实际大高差台阶量块测量中,重构高度与参考值误差小于0.5%,总耗时仅为传统方法的约1/44。实验验证了方法在大数据量和低占空比条件下具备优越的稳定性与可扩展性,具有良好的工程应用前景。
White light scanning interferometry is a high-precision,non-contact 3D measurement technique.However,in scenarios involving large-range scanning and complex measurement environments,it is susceptible to vibrations and nonlin⁃ear scanning errors,which lead to non-uniformly distributed sampling signals.This in turn degrades the stability and computa⁃tional efficiency of traditional fitting algorithms.To address the signal distortion caused by non-uniform sampling,an opti⁃mized Fourier series fitting method based on region of interest segmentation is proposed.The method first performs coarse peak localization to quickly identify the effective region of the interference signal,eliminating invalid background segments.It then applies a multithreaded parallel computing strategy to perform segmented fitting and reconstruction,effectively reducing the fitting order and computational cost.Simulation results demonstrate that the proposed method significantly improves com⁃putational efficiency while maintaining reconstruction accuracy.In practical measurements of large-step height gauge blocks,the reconstruction error is less than 0.5%compared to reference values,and the total computation time is approximately 1/44 of that required by traditional methods.Experimental results validate the method's superior stability and scalability under con⁃ditions of large data volumes and low duty cycles,indicating strong potential for engineering applications.
作者
张昊
韦晓孝
范淼
陈锦涛
ZHANG Hao;WEI Xiaoxiao;FAN Miao;CHEN Jintao(College of Optical-Electrical Information and Computer Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China)
出处
《光学技术》
北大核心
2025年第6期704-709,共6页
Optical Technique
基金
国家重点研发计划“基础科研条件与重大科学仪器设备研发”重点专项(2021YFF0700400)。
关键词
白光干涉
非均匀采样
感兴趣区域分段
傅里叶级数拟合
三维重构
white light interferometry
non-uniform sampling
fourier series fitting
region of Interest segmentation
3D reconstruction
