摘要
为提升ZrB2涂层的韧性,利用高功率脉冲磁控与脉冲直流磁控溅射复合技术,在ZrB2涂层中加入C元素,调节乙炔流量,制备了具有不同碳含量的Zr-B-C涂层。采用X射线衍射仪(XRD)和扫描电子显微镜(SEM)对涂层的物相组成和微观形貌进行表征,结合纳米压痕仪和划痕仪系统分析了涂层的力学性能;通过摩擦磨损实验机和超景深显微镜系统研究了涂层的摩擦磨损性能及表面磨损机制。结果表明:随着乙炔流量的不断增加,Zr-B-C涂层中的碳含量增多,涂层由疏松的柱状晶结构转变为致密的纳米复合结构;涂层的硬度、磨损率、临界载荷和残余应力均先降低再升高最后再降低,摩擦系数、H/E和H3/E*2先升高后降低,弹性模量呈现下降趋势。当乙炔流量为10 mL/min时,Zr-B-C涂层展现出优异的摩擦磨损性能,其硬度、摩擦系数及磨损率分别为23 GPa、0.909和2.3×10^(-7)mm^(3)/(mm·N)。
To enhance the toughness of ZrB2 coatings,the composite technology of high-power pulsed magnetron sputtering and pulsed direct current magnetron sputtering was utilized to incorporate C elements into ZrB2 coatings and further prepare Zr-B-C coatings with different carbon contents by adjusting the acetylene flow rate.The phase composition and microstructure of the coatings were characterized by X-ray diffraction(XRD)and scanning electron microscopy(SEM),and the mechanical properties of the coatings were systematically analyzed using a nanoin-dentation tester and a scratch tester.Meanwhile,the friction and wear performance and surface wear mechanism of the coatings were investiga-ted by a friction and wear tester and a super-depth-of-field microscope.Results showed that as the acetylene flow rate increased,the carbon content within the Zr-B-C coatings rose,leading to a structural transformation from a porous columnar crystal structure to a dense nanocompos-ite structure.The hardness,wear rate,critical load,and residual stress of the coatings initially decreased,then increased,and finally de-creased again.In addition,the friction coefficient,H/E ratio and H^(3)/E^(*2) ratio first rose and then declined,while the elastic modulus exhibited a consistent downward trend.When the acetylene flow rate was 10 mL/min,the Zr-B-C coating demonstrated excellent tribological perform-ance,with a hardness of 23 GPa,a friction coefficient of 0.909,and a wear rate of 2.3×10^(-7) mm^(3)/(mmN).
作者
许梦娇
刘艳梅
尹照星
石壮
庄思明
王鹏
王铁钢
XU Mengjiao;LIU Yanmei;YIN Zhaoxing;SHI Zhuang;ZHUANG Siming;WANG Peng;WANG Tiegang(Tianjin Advanced Tool Coating Proof of Concept Center,Tianjin Key Laboratory of High Performance Manufacturing Technology and Equipment,Tianjin Polytechnic Normal University,Tianjin 300222,China;TZ(Tianjin)Binhai Heavy Machinery Co.,Ltd.,Tianjin 300457,China;Harbin Electric Corporation(Qinhuangdao)Heavy Equipment Co.,Ltd.,Qinhuangdao 066206,China)
出处
《材料保护》
2025年第11期36-44,共9页
Materials Protection
基金
中央引导地方科技发展资金(24ZYCGCG00520)
天津市自然科学基金项目(24JCYBJC00110)
天津市制造业高质量发展专项(25ZGSSSS00020)
内蒙古自治区自然科学基金重点项目(2025ZDLH004)。
关键词
高功率脉冲磁控溅射
Zr-B-C涂层
乙炔流量
摩擦磨损
力学性能
high-power pulsed magnetron sputtering
Zr-B-C coating
acetylene flow rate
friction and wear
mechanical properties
