摘要
通过反应磁控溅射法分别沉积了不同Ag含量(Ag/(Ag+Cr)=2.9~21.2%(原子比))的CrN/Ag复合膜,采用能谱仪、X射线衍射仪、纳米压痕仪、扫描电镜、摩擦磨损仪等研究了CrN/Ag复合膜的化学成份、微观结构、力学性能及摩擦磨损性能。结果表明:CrN/Ag薄膜为面心立方结构,由fcc-CrN及fcc-Ag构成。薄膜晶粒尺寸随Ag含量的升高逐渐降低。薄膜硬度随Ag含量的升高先升高后降低,当Ag含量为8.3%时,薄膜硬度最高,其最高值为23 GPa。薄膜硬度受细晶强化与软质Ag相的共同作用。CrN/Ag薄膜平均摩擦系数及磨损率随Ag含量的升高先降低后升高,当Ag含量为8.3%时,薄膜平均摩擦系数与磨损率最小,其最小值分别为0.50和0.68×10^(-8)mm^3。/N·mm。薄膜平均摩擦系数及磨损率主要受低剪切强度Ag含量和H/E值的影响。
The Ag-dopedCrN coatings were deposited by reactive magnetron sputtering on substrates of Si（100） and 304 stainless steel.The effect of the Ag-content on the microstructures,mechanical and tribological properties of the coatings was investigated with X-ray diffraction,energy dispersive spectroscopy,scanning electron microscopy,nano-indentation and ball-on-disc tribo-meter.The results show that the Ag-content strongly affects the properties of Ag-doped CrN coatings consisting of fcc-CrN and fcc-Ag grains.For example,as the Ag-content increased from 2.9%to 21.2%,the grain-size decreased,the hardness changed in an increase-decrease mode,possibly because Ag-induced CrN grain-size reduction and Ag-phase formation;but the average friction coefficient varied in a decrease-increase manner.Grown at 8.3%of Ag,the coatings have the highest hardness（23 GPa）,the lowest average friction coefficient（0.50） and wear-rate（0.68 × 10^-8 mm^3 /N · mm）.Thetribological properties were found to strongly depend on the Ag-content and H/E ratio.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2016年第4期413-417,共5页
Chinese Journal of Vacuum Science and Technology
基金
国家自然科学基金项目(51374115
51574131)
