摘要
微机械环形陀螺作为一种具备导航级应用前景的角速度传感器,其性能与结构形态及几何参数密切关联。然而,环形谐振子动力学模型高度复杂,目前尚无系统化的设计准则。同时,受制于有限的器件面积和工艺精度约束,检测灵敏度的大幅提升成为亟待突破的技术瓶颈。本文提出一种具有高检测灵敏度与环境适应性的微机械环陀螺结构,并基于其几何模型推导了陀螺的灵敏度表达式。依托某联合仿真平台,采用改进的差分进化算法,对环形陀螺的结构参数进行了优化。以最大化环陀螺的检测灵敏度为目标,结合了不可行解处理机制以应对陀螺对环境适应性与工艺可行性的要求。结果表明,优化后的环陀螺结构不仅满足了既定的工艺要求,还展现出了出色的抗冲击能力。更重要的是,与初始方案相比,其检测灵敏度提升了3~9倍。该方法充分发掘了环形陀螺的力学性能潜力。
The Micro-electro-mechanical-system ring gyroscope,as an angular velocity sensor with navigation-grade application potential,exhibits a close correlation between its performance and its structure and geometric parameters.However,due to the high complexity of the dynamic model of ring resonators,systematic design guidelines remain absent.Additionally,under constraints of limited device area and fabrication precision,significantly enhancing detection sensitivity poses a critical technical bottleneck.In this study,a micro ring gyroscope with high sensitivity and environmental adaptability is proposed,and the sensitivity expression of the gyroscope is derived based on its geometric model.To further optimize the structural parameters of the ring gyroscope,an improved differential evolution algorithm is employed on a co-simulation platform.The goal is to maximize the detection sensitivity of the ring gyroscope,while incorporating a mechanism for handling infeasible solutions to ensure that the gyroscope meets both environmental adaptability and process feasibility requirements.The results indicate that the optimized ring gyroscope structure not only satisfies the process requirements but also demonstrates good shock resistance.More importantly,compared to the initial design,its detection sensitivity is enhanced by a factor of 3~9.This method fully exploits the mechanical performance potential of the ring gyroscope.
作者
葛啸
陈旭辉
丁徐锴
李宏生
Ge Xiao;Chen Xuhui;Ding Xukai;Li Hongsheng(Southeast University,Nanjing 210089,China;AVIC Xi’an Flight Automatic Control Research Institute,Xi’an 710062,China)
出处
《航空科学技术》
2025年第7期104-112,共9页
Aeronautical Science & Technology
基金
航空科学基金(20220008069002)。
