摘要
基于中国计量科学研究院的毫米级纳米几何结构样板标准装置,以及一维纳米栅格国家计量比对的100 nm与200 nm传递标准,开展了一维栅格测量方法研究,着重研究了栅格轮廓提取方法和基于重心法的栅格周期评价方法,经不确定度评定传递标准的不确定度小于1 nm。规范了栅格测量方法,有效地减少了测量过程中引入的人为误差,提升国内纳米栅格计量能力以及测量量值与测量结果的准确一致程度。
Based on the millimeter-level nano-geometric structure template calibration device of the national institute of metrology,as well as the 100 nm and 200 nm standards for national metrology comparison of one-dimensional nano grids,research on one-dimensional grid measurement method was carried out,with a focus on the grid contour extraction method and the grid period evaluation method based on the gravity center method.The uncertainty is low than 1 nm after the uncertainty evaluation of the grid measurement.This can standardize the grid measurement method,effectively reduce the introduction of human errors in the measurement process,improve the domestic nano grid metrology capability,and the accuracy and consistency of measurement values and results.
作者
王芳
施玉书
皮磊
张树
WANG Fang;SHI Yushu;PI Lei;ZHANG Shu(National Institute of Metrology,Beijing 100029,China;Shenzhen Institute of Metrology Innovation,NIM,Shenzhen,Guangdong 518132,China)
出处
《计量学报》
北大核心
2025年第9期1294-1299,共6页
Acta Metrologica Sinica
基金
国家重点研发计划(2021YFF0704705)
国家计量比对(2022-B-06)。
关键词
纳米计量
一维栅格
校准
国家计量比对
不确定度评定
栅格轮廓提取
栅格周期评价
重心法
nanometrology
one-dimensional nano gratings
calibration
national metrology comparison
uncertainty assessment
grid contour extraction
grid period evaluation
gravity center method
