摘要
基于高稳定性平面镜干涉仪（HSPMI）构建了一套激光干涉纳米位移校准系统。描述了该系统的组成，设计了基于VME总线的数字信号处理计算机软件程序，对影响系统测量不确定度的各类误差进行了分析，得出该校准系统测量不确定度为2．93nm。分别对系统稳定性和纳米级位移测试进行了实验，验证了构建系统的有效性和实用性。
A laser interferometer of nanometer displacement calibration system has been constructed based on high stability plane mirror interferometer （ HSPMI）. The layout of the calibration system is described. The data acquisition software based on VME bus has been designed for digital signal processing. Errors of the calibration system have been analyzed and the me^rsurement accuracy is 2. 93 nm. The results of the stability test and the nanometer displacement measurement of the calibration system demonstrate that the calibration system is effective and practical.
出处
《计量学报》
CSCD
北大核心
2013年第6期519-523,共5页
Acta Metrologica Sinica
基金
国家科技支撑计划（2011BAKl5809）
