摘要
为适应显微标尺多样化检测需求并降低成本,设计了具备多种瞄准功能的光电显微镜,搭建显微标尺桌面型测量系统。为提高测量精度,基于低成本线性滚珠导轨,研究实现干涉比长的平滑运动方法和小行程干涉比长余弦误差的减小方法;提出光电信号和光电图像融合的测量方法,研究显微图像的处理方法,经计量比对,光电信号测量1 mm显微标尺刻线间距时,与参考值最大差异44 nm,标准不确定度69 nm,归一化偏差绝对值小于1;利用光电图像测量法测量线宽和线间距,结果与参考值一致,可完成光电信号测量法无法实现的测量,具备二维测量特性。研究表明,该显微标尺桌面型测量系统以较低成本发挥了两种测量方法的优势。
To meet the diverse measurement needs of micropattern standards and reduce costs,a photoelectric microscope with multiple positioning functions is designed,and a desktop measurement system for micropattern standards is built.To improve the measurement accuracy,based on low-cost linear ball guides,a smooth movement method for realizing interference length comparison and the reduction method of cosine error of small-stroke interference length comparison are studied.A measurement method integrating photoelectric signals and photoelectric images is proposed,the processing method of microscopic images is studied.The measurement accuracy of the system is analyzed through measurement comparison,the maximum difference between the photoelectric signal method and the reference value when measuring the 1 mm micropattern standard,the line spacing is 44 nm,the standard uncertainty is 69 nm,and the absolute value of the normalized deviation is less than 1.Using the photoelectric image measurement method to measure line width and line spacing,the results are consistent with the reference values.The measurement that cannot be completed by the photoelectric signal measurement method is completed,with two-dimensional measurement characteristics.The research has shown that the desktop measurement system of micropattern standards gives full play to the advantages of the two methods at a lower cost.
作者
高宏堂
朱彦龙
程银宝
孙双花
沈雪萍
张旭东
薛靓
汤江文
GAO Hongtang;ZHU Yanlong;CHENG Yinbao;SUN Shuanghua;SHEN Xueping;ZHANG Xudong;XUE Liang;TANG Jiangwen(National Institute of Metrology,Beijing 100029,China;China Jiliang University,Hangzhou,Zhejiang 310018,China;National Institute of Measurement and Testing Technology,Chengdu,Sichuan 610021,China)
出处
《计量学报》
北大核心
2025年第9期1256-1264,共9页
Acta Metrologica Sinica
基金
国家重点研发计划(2023YFF0616201)
中国测试技术研究院国家计量基准科研经费项目(N5100012023002373)。
关键词
几何量计量
线纹尺
显微标尺
融合显微镜
图像测量
geometric measurement
line scale
micropattern standards
integrated microscope
image measurement
