摘要
非晶超导薄膜材料具有超导电性均匀性高以及光响应灵敏度好等优势,是研制大光敏面以及中远红外超导纳米线单光子探测器的理想超导薄膜材料.本文系统研究了新型非晶锗化钨超导体的超导物性随薄膜材料厚度的变化.对比硅化钨与锗化钼非晶超导薄膜,研究发现锗化钨合金与硅化钨具有相似的超导物性,包括相近的临界温度和相干长度,稍低的正常态电子扩散系数和较高的磁穿透深度.相较于锗化钼,锗化钨合金与硅化钨的电子扩散系数和磁穿透深度均呈现不同程度的增大.通过研究3种不同非晶薄膜的超导物性参数,为大光敏面、高灵敏度超导纳米线单光子探测器的研发与性能优化提供了新的材料选择与实验依据.
Amorphous superconducting thin film materials have the advantages of high superconducting uniformity and good optical response sensitivity,which make them ideal materials for fabricating large-area and midinfrared superconducting nanowire single-photon detectors(SNSPD).In this paper,three series of different amorphous superconducting films are deposited on Si wafers by room-temperature magnetron co-sputtering.For these films,the dependence of their physical properties,i.e.critical temperature T_(c),Ginzburg-Landau coherence length ξ(0),normal-state electron diffusion coefficient D_(e),magnetic penetration depth λ(0),and superconducting energy gap Δ(0),on film thickness is systematically investigated.Compared with amorphous tungsten silicide(WSi)and molybdenum germanide(MoGe)superconducting thin films,WGe alloys and WSi have similar superconducting properties,including critical temperature and coherence length,slightly lower normal-state electron diffusion coefficient and higher magnetic penetration depth.Compared with MoGe,both WGe and WSi alloys exhibit larger normal-state electron diffusion coefficient and higher magnetic penetration depths.By studying the superconducting properties of three different amorphous thin films,this research provides new material choices and experimental evidence for developing and optimizing the performance of large-area,highsensitivity superconducting nanowire single-photon detectors.
作者
许洛
张孝富
尤立星
XU Luo;ZHANG Xiaofu;YOU Lixing(School of Microelectronics,Shanghai University,Shanghai 201800,China;Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China)
出处
《物理学报》
北大核心
2025年第18期323-331,共9页
Acta Physica Sinica
基金
科技创新2030——“量子通信与量子计算机”(批准号:2023ZD0300100)资助的课题.
关键词
超导纳米线单光子探测器
非晶超导薄膜材料
锗化钨
超导物理学性质
superconducting nanowire single photon detector
amorphous superconducting thin film materials
tungsten germanide
superconducting physical properties
