摘要
集成电路产业的迅猛发展推动着全球半导体行业向高端制程迈进,湿电子化学品中无机酸作为集成电路产业的关键材料,其纯度直接影响芯片制造的工艺稳定性和产品良率。相应地,电子级无机酸中阴阳离子杂质检测技术的发展显得尤为重要。离子色谱法因其检测灵敏度高,快速方便和结果准确等优点,广泛应用于湿电子化学品电子级无机酸中痕量阴离子的检测,同样地,电感耦合等离子体质谱法因其抗干扰能力强、动态范围宽和快速准确分析等优点,广泛应用于湿电子化学品电子级无机酸中痕量阳离子的检测。简要介绍了电子级无机酸中硝酸、氢氟酸、盐酸、硫酸和磷酸的理化性质和在半导体工艺中的作用,并将国内外标准中的关键指标进行了列表对比,对近年来电子级无机酸中阴阳离子检测技术的研究进展进行了综述,重点介绍了各种无机酸在进行阴离子和阳离子检测时样品的前处理方法,容易遇到的检测难点以及相应地解决方法。此外,还探讨了湿电子化学品在半导体行业的未来发展趋势。
The rapid development of the integrated circuit industry is propelling the global semiconductor sector toward advanced manufacturing processes.Inorganic acids,as critical components of wet electronic chemicals,are key materials for the integrated circuit fabrication,where their purity directly impacts the process stability and product yield.Accordingly,the development of detection technologies for anions and cations impurities in electronic-grade inorganic acids has become particularly important.Ion chromatography is widely used for the detection of trace anions in electronic-grade inorganic acids due to its high detection sensitivity,rapidity,convenience and accuracy.Likewise,inductively coupled plasma mass spectrometry is extensively used for the trace cations detection due to its strong anti-interference ability,wide dynamic range,and rapid,accurate analysis.This review briefly introduced the physicochemical properties and roles of five commonly used electronic-grade inorganic acids—nitric acid,hydrofluoric acid,hydrochloric acid,sulfuric acid and phosphoric acid—in electronic-grade inorganic acids.Key indicators from domestic and international standards were compared and summarized.The recent progress of anion and cation detection technology in electronic-grade inorganic acids was comprehensively reviewed with a focus on sample pretreatment methods for various inorganic acids during anion and cation detection,common analytical challenges,and the corresponding solutions.In addition,the future development trends of wet electronic chemicals in the semiconductor industry are also discussed.
作者
王勇
常燕
郝萍
李春华
曹建雄
高一鸣
WANG Yong;CHANG Yan;HAO Ping;LI Chun-hua;CAO Jian-xiong;GAO Yi-ming(Shanghai Institute of Measurement and Testing Technology,Shanghai 201203,China)
出处
《化学试剂》
2025年第9期41-49,共9页
Chemical Reagents
基金
国家市场监督管理总局科技计划项目(2024MK026)。
关键词
湿电子化学品
无机酸
阴阳离子
国内外标准
技术进展
wet electronic chemicals
inorganic acid
anion and cation
domestic and international standards
technical progress
