摘要
为了适应半导体芯片、液晶制造业向中国转移,半导体芯片和集成电路微细加工、薄膜—液晶制造工艺需要的电子级磷酸包括MOS级、BV级万吨规模工业化装置正在各地建设。提出了发展我国电子级磷酸的工业化战略,并提出了与电子级磷酸制备工艺相关的配套技术开发意见和建议。
To tailor to the shift of semiconductor chip and LCD production to China,10 kt/a industrial plants for electronic grade phosphoric acid,including MOS grade and BV grade,which are required in the production of semiconductor chip and integrated circuit micro-processing,and membrane-LCD,are under construction in China.The industrialization strategy for the development of electronic grade phosphoric acid in China is outlined,and comments and suggestions are given for the development of associated technologies for the production of electronic grade phosphoric acid.
出处
《硫磷设计与粉体工程》
2010年第2期15-19,共5页
Sulphur Phosphorus & Bulk Materials Handling Related Engineering
关键词
磷酸+电子级
电子化学品
工业化战略
技术
phosphoric acid + electronic grade
electronic chemical
industrialization strategy
technology
