摘要
文章提出在硅光电倍增管(SiPM)死区表面制备高反射金属膜,通过金属膜与透明封装层的光学谐振腔效应,将死区入射光导向光敏区,以提升其光子探测效率及绝对量子效率。基于几何光学理论建模并结合Comsol多物理场仿真,分析了量子效率的增强机制。结果显示,理论计算和光学仿真得到的光透射率增幅分别为6.23%和6.31%,半导体器件仿真证明绝对量子效率增幅6.2%,与透射率增幅一致。该方法有效突破死区损耗限制,为提升SiPM光子探测性能提供了一种可行方案。
This study proposes a method that involves depositing a highly reflective metal film on the dead-zone surface of the SiPM.This structure forms an optical resonant cavity with the transparent encapsulation layer,redirecting incident light from the dead zones to the photosensitive regions,thereby enhancing both the PDE and absolute quantum efficiency.The mechanism behind this enhancement was analyzed using geometric optics modeling in combination with simulations performed in Comsol Multiphysics.Theoretical calculations and optical simulations reveal an increase in light transmittance of 6.23%and 6.31%,respectively.Additionally,semiconductor device simulations demonstrate a 6.2%improvement in absolute quantum efficiency,aligning closely with the simulated transmittance gains.This approach effectively mitigates losses due to the dead zones,offering a viable solution for enhancing the photon detection capabilities of SiPMs.
作者
郭超前
王军
吴云
杨延飞
张向通
张昊童
王磊
刘露
刘丽娜
李连碧
韩小祥
李泽斌
张国青
GUO Chaoqian;WANG Jun;WU Yun;YANG Yanfei;ZHANG Xiangtong;ZHANG Haotong;WANG Lei;LIU Lu;LIU Lina;LI Lianbi;HAN Xiaoxiang;LI Zebin;ZHANG Guoqing(School of Science,Xi'an Polytechnic University,Xi'an 710048,CHN;Beijing Institute of Control Engineering,Beijing 100190,CHN;School of Science,Xi'an University of Technology,Xi'an 710048,CHN;Key Laboratory of Nuclear Protection Textile Equipment Technology,Xi'an 710048,CHN;Shaanxi Provincial Engineering Research Center for Radiation Flexible Protection Technology,Xi'an 710048,CHN)
出处
《半导体光电》
北大核心
2025年第4期645-651,共7页
Semiconductor Optoelectronics
基金
陕西省重点研发计划项目(2024GX-YBXM-081、2023-YBGY-196)
北京控制工程研究所空间光电测量与感知实验室开放基金项目(LabSOMP-2023-01)
国家自然科学基金委员会-中国工程物理研究院NSAF联合基金项目(U2330109)
陕西省自然科学基础研究计划项目(2024JC-YBMS-023、2022JQ-660)
等离子体物理国家重点实验室项目(6142A04230302)
陕西数理基础科学研究项目(22JSY030、22JSY012)
陕西省教育厅服务地方专项(22JC033)。
关键词
硅光电倍增管
间隔区域
光子探测效率
绝对量子效率
silicon photomultiplier
dead zone
spacing region
photon detection efficiency
absolute quantum efficiency
