摘要
氧化铈抛光粉能够形成化学机械拋光(CMP)作用,可满足精密抛光领域需求,具有抛光速度快、光洁度高、平整度高、抛光后产品使用寿命长的特点。该领域内,国际主要研究方向集中于氧化铈抛光粉的应用优化与拓展、氧化铈颗粒的大小形貌等对抛光性能的影响、添加剂的引入及清洗方式等对表面缺陷等的回复作用、抛光粉粒径控制工艺等,而我国则在抛光粉粒径把控、优化生产工艺、缩短生产周期以及提高设备利用率等方面仍存在不足。氧化铈抛光粉的制备方法主要有固相法、液相法和气相法。固相法包括固相烧结法和固相机械法,通常能耗较高、反应时间较长;液相法包括水热法、溶胶-凝胶法、沉淀法、微波法和微乳液法等,这些方法在较低的温度下进行,能获得粒度更均匀的抛光粉,然而部分液相法工艺复杂,溶剂及副产物的处理亦需优化;气相法主要包括喷雾干燥法和喷雾热解法,其通过将溶液或悬浮液雾化成细小的液滴,然后在高温下迅速蒸发溶剂形成固体颗粒,能够生产出具有特定形态和大小的抛光粉。随着全球对环境保护意识的增强,开发低能耗、绿色合成方法已成为大势所趋,气相法和其他环境友好型合成方法将受到更多关注;未来的研究将更加注重氧化铈粉末的粒度和形貌控制,以满足不同领域的抛光需求。
Cerium oxide polishing powder can form a chemical mechanical polishing(CMP)function,which meets the needs of the precision polishing field.It is characterized by a fast polishing speed,high finish,high flatness,and a long service life for polished products.In this field,the main international research directions focus on the application optimization and expansion of cerium oxide polishing powder,the influence of the size and morphology of cerium oxide particles on polishing performance,the recovery effect of the introduction of additives and cleaning methods on surface defects,and the particle size control process of polishing powder,among others.Conversely,in China,there are still shortcomings in particle size control,optimizing the production process,shortening the production cycle,and improving equipment utilization.The preparation methods of cerium oxide polishing powder are mainly solid phase,liquid phase,and gas phase.The solid phase method includes solid phase sintering and solid phase mechanical methods,which typically have higher energy consumption and longer reaction times.The liquid phase method includes hydrothermal,sol-gel,precipitation,microwave,and microemulsion methods,among others.These methods are conducted at lower temperatures and can produce polishing powder with a more uniform particle size.Nevertheless,some liquid phase methods are complex,and the treatment of solvents and by-products also needs optimization.The gas phase method mainly includes spray drying and spray pyrolysis,which can produce polishing powder with specific shapes and sizes by atomizing solutions or suspensions into fine droplets and then rapidly evaporating the solvent to form solid particles at high temperatures.With the enhancement of global environmental awareness,the development of low energy consumption and green synthesis methods has become a trend,and gas phase and other environmentally friendly synthesis methods will receive more attention.Future research will pay more attention to the particle size and morphology control of cerium oxide powder to meet the polishing needs of different fields.
作者
杨超凡
杨国胜
王振峰
刘铃声
欧阳顺利
刘中兴
YANG Chaofan;YANG Guosheng;WANG Zhenfeng;LIU Lingsheng;OUYANG Shunli;LIU Zhongxing(School of Materials Science and Engineering,Inner Mongolia University of Science and Technology,Baotou 014010,China;College of Rare Earth Industry(College of Rare Earth Engineering and Technology),Inner Mongolia University of Science and Technology,Baotou 014010,China;Key Laboratory of Green Extraction and Efficient Utilization of Light rare Earth Resources(Ministry of Education),Inner Mongolia University of Science and Technology,Baotou 014010,China;Clean Extraction and Application of Light Rare Earth Inner Mongolia Autonomous Region Engineering Research Center,Inner Mongolia University of Science and Technology,Baotou 014010,China;Baotou Tianjiao Qingmei Rare Earth Polishing Powder Co.,Ltd.,Baotou 014030,China;State Key Laboratory of Rare Earth Resources Research and Comprehensive Utilization of Bayan Ebo,Baotou Research Institute of Rare Earths,Baotou 014030,China;College of Letters and Science,Guangzhou Maritime University,Guangzhou 510725,China)
出处
《中国有色冶金》
北大核心
2025年第4期38-50,共13页
China Nonferrous Metallurgy
基金
内蒙古自治区应用技术研究与开发资金项目(2021GG0103)
内蒙古自治区直属高校基本科研业务费项目(0406082222)
内蒙古自治区自然基金资助项目(2022LHMS05024)
广州市教育局高校科研项目(2024312054)
广东省普通高校特色创新类项目(2024KTSCX147)。
关键词
抛光粉
氧化铈
固相法
液相法
气相法
粒度控制
形貌控制
精密制造
polishing powder
cerium oxide
solid-phase method
liquid-phase method
gas-phase method
particle size control
morphology control
precision manufacturing
