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利用双波长照明的高精度激光三角测量方法研究

High Accuracy Laser Triangulation Measurement Based on Dual-Wavelength Illumination
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摘要 激光散斑是激光三角法测量过程中的主要噪声之一,严重影响三角测量仪器的测量精度。提出了一种采用波长不同的两束激光作为光源的三角测量装置,抑制测试中的散斑现象,提高仪器测量精度。首先,介绍了激光三角测量工作原理,以及散斑与装置测量不确定度的关系。其次,论述了利用双波长照明抑制激光散斑,提高测量精度的原理,并分析了不同光源功率比下的散斑抑制效果。再次,采用405nm和420nm的两种波长激光器开展三角测量实验。验证结果表明,使用双波长光源照明,测试不确定度由0.52μm降低为0.23μm,所提出的方法能够降低三角测量仪的测量不确定度,为研制更高精度的激光三角测量仪器奠定了技术基础,具有重要的应用价值。 Laser speckle is one of the main sources of noise in the measurement process of laser triangulation measurement,which significantly impacts the measurement uncertainty of triangulation measurement instruments.A triangulation measurement device taking two lasers with different wavelengths as the light sources is proposed to suppress the speckle phenomenon during testing and improve the measurement accuracy of the instrument.At first,the working principle of laser triangulation measurement and the relationship between speckle and the measurement uncertainty of the device are introduced.And then,the principle of using dual-wavelength illumination to suppress speckle and improve the accuracy of triangulation measurements is introduced,and the speckle suppression effects under different power ratios of light sources are analyzed.At last,lasers with wavelengths of 405 nm and 420 nm are used to conduct triangulation measurement experiment.Experimental results indicate that the method can reduce the measurement uncertainty of the theodolite.After illumination with a dual-wavelength light source,the instrument's testing uncertainty decreases from 0.52μm to 0.23μm.The measurement uncertainty can be reduced,which lays the technical groundwork for the development of higher precision laser triangulation instruments and possesses important practical value.
作者 王君光 赵哲承 陈新华 沈为民 WANG Junguang;ZHAO Zhecheng;CHEN Xinhua;SHEN Weimin(Academy of Opto-Electronics,China Electronics Technology Group Corporation(AOE CETC),Tianjin,China;Suzhou PLS Technology Co.,LTD.,Suzhou,China;School of Optoelectronic Science and Engineering,Soochow University,Suzhou,China;Key Laboratory of Modern Optical Technologies of Education Ministry of China,Suzhou,China)
出处 《光电技术应用》 2025年第3期30-33,68,共5页 Electro-Optic Technology Application
关键词 测量系统 激光三角测量 测量不确定度 散斑 measurement system laser triangulation measurement measurement uncertainty speckle
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