摘要
本文研制了一台高光谱分辨、高系统接收角,同时具有一定空间分辨的真空紫外波段光谱仪。该光谱仪采用典型的Czerny-Turner结构,系统准直镜和聚焦镜均采用离轴抛物面镜,入射臂272.24mm,采用平面闪耀光栅,线密度300L/mm,闪耀波长230nm,光栅入射角30°,利用一台可深度制冷、背照式面阵CCD作为光谱探测器进行信号探测。谱仪研制完成后,利用Penning灯放电光源测试谱仪性能,并利用光源的标准谱线进行了波长标定,结果显示该谱仪波长覆盖范围112.5~406nm,全波段光谱分辨率优于0.5nm,波长精度优于0.05nm,达到设计指标。
The paper develops a vacuum ultraviolet spectrometer with high spectral resolution,high system reception angle,and certain spatial resolution.The spectrometer adopts a typical Czerny Turner structure,with both the collimating and focusing mirrors using off-axis parabolic mirrors,an incident arm of 272.24mm,a planar blazed grating with a line density of 300L/mm,a blazed wavelength of 230nm,and a grating incidence angle of 30°.The signal is detected using a deep cooling,backlit planar array CCD as the spectral detector.After the development of the spectrometer was completed,the performance of the spectrometer was tested using a Penning lamp discharge light source,and wavelength calibration was performed using the standard spectral lines of the light source.The results showed that the spectrometer had a wavelength coverage range of 112.5-406nm,a full band spectral resolution better than 0.5nm,and a wavelength accuracy better than 0.05nm,meeting the design specifications.
作者
耿继宝
李长松
张志杰
马丽敏
李朝阳
Geng Jibao;Li Changsong;Zhang Zhijie;Ma Limin;Li Chaoyang(Specreation Instrument Technology Co.,Ltd.,Hefei 230094)
出处
《仪器仪表标准化与计量》
2025年第4期20-22,共3页
Instrument Standardization & Metrology
基金
2021年合肥市重大专项定向委托项目:极紫外(EUV)光谱诊断分析系统项目(编号:2021DX001)。
