摘要
为了研究水辅助下调控矢量光场在硅片表面的加工特性,搭建了调控纳秒矢量激光水辅助表面加工系统。采用Nd:YAG脉冲调Q激光器,对厚度为3 mm的单晶硅进行激光打孔实验,在静水和水射流辅助下,对矢量激光的脉冲次数、光束的偏振态、拓扑荷数以及水流流量对单晶硅表面加工的影响进行了系统研究。结果表明,在水辅助的情况下,热影响区和重铸层的影响基本消失,矢量光束相较于线偏振光,在高脉冲次数下会获得更大孔径;高拓扑荷数的广义柱矢量偏振光与径向和角向偏振光相比,打孔更为光滑;在水射流辅助的情况下,当水流流量超过0.8 L/min时,激光加工的孔的圆对称性会有所破坏,广义柱矢量偏振光相较于径向与角向偏振光能够更好保持孔的圆对称性。将水辅助与矢量激光相结合,可以完成更多精密加工的工作,在工业加工中具有实际应用的价值。
To investigate the machining characteristics of vector laser fields on silicon surfaces under water assistance,a nanosecond vector laser water-assisted surface machining system was developed.A Q-switched Nd:YAG pulsed laser was used to perform laser drilling experiments on 3 mm thick monocrystalline silicon.The effects of pulse number,beam polarization state,topological charge,and water flow rate on silicon surface machining were systematically studied under both static water and water-jet assistance.The results show that under water-assisted conditions,the heat-affected zone and recast layer are almost eliminated.Compared to linearly polarized light,vector beams produce larger hole diameters at high pulse numbers.Among generalized cylindrical vector beams,radial and azimuthal polarization,and higher topological charge vector beams,the latter results in smoother hole surfaces.Under water-jet assistance,when the water flow rate exceeds 0.8 L/min,the circular symmetry of the machined hole begins to degrade.However,compared to radial and azimuthal vector beams,generalized cylindrical vector beams better maintain hole symmetry.The combination of water assistance and vector laser technology enables more precise machining,demonstrating significant potential for industrial applications.
作者
许佳康
王吉明
欧盛美
王建磊
XU Jiakang;WANG Jiming;OU Shengmei;WANG Jianlei(Department of Applied Physics,College of Physics,Nanjing University of Aeronautics and Astronautics,Nanjing 211106,China;Key Laboratory of Aerospace Information Materials and Physics MIIT,Nanjing University of Aeronautics and Astronautics,Nanjing 211106,China;Anhui Zhongke Chungu Laser Industry Technology Research Institute Co.,Ltd.,Wuhu 241200,China)
出处
《激光技术》
北大核心
2025年第4期501-506,共6页
Laser Technology
基金
国家自然科学基金资助项目(GAA22080-01)
中央高校基本科研业务费资助项目(56XCA2405001)
芜湖市重大科技项目(2021zd10)。
关键词
激光技术
矢量光场
表面加工
水射流
laser technique
vector light field
surface machining
water jet
