摘要
使用波长为515 nm的飞秒激光对金属钛表面实施抛光操作,深入剖析在不同激光参数条件下加工区域表面形貌的形成机制。通过改变激光焦点位置抑制驼峰状结构的产生,加工质量得到明显改善,给出抛光金属钛最佳激光参数窗口。实验发现,激光焦点处于样品表面时,随着加工层数的递增,驼峰状结构尺寸不断增大,并由样品划痕处逐步蔓延至整个加工区域。当能量密度达25.88 J/cm2时,正离焦量在0至2.5 mm范围内逐渐增大,驼峰状结构随之逐渐减小直至完全消失,抛光深度从38.94μm提升至108.02μm;当离焦量为2.5 mm时,表面粗糙度从原始的1.496μm降低至0.314μm。
A femtosecond laser with a wavelength of 515 nm is used to perform polishing operations on the surface of titanium metal to analyze the formation mechanism of surface morphology in the processed area under different laser parameters.By changing the laser focus position to suppress the formation of a hump-like structure,the processing quality is significantly improved and the optimal laser parameter window for polished titanium metal is obtained.It is found that when the laser focus is on the surface of the sample,the size of the bump-like structure increases with the increment of the number of processed layers and gradually spreads from the scratch of the sample to the whole processed area.At an energy density of 25.88 J/cm²,the positive defocus amount gradually increases in the range from 0 to 2.5 mm,and then the hump-like structure gradually decreases until it disappears completely,while the polishing depth increases from 38.94μm to 108.02μm.The surface roughness is reduced from the original 1.496μm to 0.314μm when the defocus amount is 2.5 mm.
作者
杨肖康
李朋
王自
王明伟
刘洪亮
Yang Xiaokang;Li Peng;Wang Zi;Wang Mingwei;Liu Hongliang(Institute of Modern Optics,College of Electronic Information and Optical Engineering,Nankai University,Tianjin 300350,China;Xi'an Zhongke Micro Precision Photonics Technology Co.,Ltd.,Xi'an,Shaanxi 710065,China)
出处
《光电工程》
北大核心
2025年第6期63-71,共9页
Opto-Electronic Engineering
关键词
飞秒激光加工
金属钛
抛光
表面粗糙度
femtosecond laser processing
titanium
polishing
surface roughness
