摘要
构建了高斯脉冲激光线刻蚀能量密度分布模型,研究了激光功率和脉冲数对化学气相沉积(Chemical Vapor Deposition,CVD)金刚石表面上的点/线尺寸的影响规律,得到了能量在材料表面的扩散机理及刻蚀面组分,并在此基础上进行了激光面刻蚀。结果表明:高斯单脉冲激光作用下刻蚀轮廓近似为高斯曲面,间接证明了激光束在材料表面作用的能量呈高斯分布,且刻蚀面由金刚石、石墨和杂化物质构成,CVD金刚石表面的脉冲点刻蚀深度和宽度都随着激光功率和脉冲数的增大而增大。激光功率对CVD金刚石表面线刻蚀程度的影响较大,当功率值增大12 W时,刻蚀宽度和侧面扫入深度分别增大23.32μm和346.04μm;激光扫描速度则对CVD金刚石表面线刻蚀程度的影响相对较小,当扫描速度增大49.8 mm/s时,刻蚀宽度和侧面扫入深度分别减小了6.35μm和70μm。在功率为3 W、扫描速度为50 mm/s和扫描间距为2μm的条件下进行了激光面刻蚀,刻蚀深度为9.71μm,表面粗糙度为1.10μm。
The Gaussian pulsed laser line etching energy density distribution model is constructed, and the effects of laser power and number of pulses on the point/line size of diamond surface produced by chemical vapor deposition(CVD) are studied. The diffusion mechanism of energy on material surfaces and the compositions of etched surfaces are obtained. On this basis, the laser surface etching is conducted. The results show that the etching profile is approximately a Gaussian one under the action of single Gaussian pulse, which indirectly proves that the energy of laser beam acting on the material surface shows a Gaussian distribution and the etching surface is composed of diamond, graphite and hybrid materials. Moreover, both the pulse point etching depth and width increase as laser power and number of pulses increase. The laser power has a great influence on the line etching degree of the CVD diamond surface. When the power value increases by 12 W, the etching width and side sweep depth increase by 23.32 μm and 346.04 μm, respectively. In contrast, the laser scanning speed has a relatively small influence on the line etching degree of the CVD diamond surface. When the scanning speed increases by 49.8 mm·s-1, the etching width and side sweep depth decrease by 6.35 μm and 70 μm, respectively. The etching results under the conditions of power of 3 W, scanning speed of 50 mm·s-1 and scanning spacing of 2 μm indicate that the etching depth is 9.71 μm and the surface roughness is 1.10 μm.
作者
陈妮
闫博
李振军
李亮
何宁
Chen Ni;Yan Bo;Li Zhenjun;Li Liang;He Ning(College of Mechanical and Electrical Engineering Nanjing University of Aeronautics and Astronautics Nanjing,Jiangsu 210016,China)
出处
《中国激光》
EI
CAS
CSCD
北大核心
2020年第12期119-126,共8页
Chinese Journal of Lasers
基金
国家自然科学基金(51905270,U1601204)
江苏省自然科学基金青年项目(BK20180435)。
关键词
激光技术
纳秒激光加工
金刚石
高斯脉冲
点/线刻蚀
laser technique
nanosecond laser processing
diamonds
Gaussian pulse
point/line etching
