摘要
提出了一种基于玻璃通孔(TGV)高场不对称波形离子迁移谱(FAIMS)分析器结构,研制出微型化、低噪声FAIMS气体传感器,并对其环境噪声屏蔽和气体检测性能进行了测试。研究结果表明,通过垂直引线的屏蔽电极设计,该传感器的检测基线噪声低至16 fA,具有良好的噪声屏蔽性能。选择典型挥发性有机物乙苯作为测试样品,评估了FAIMS气体传感器的响应特性,并获得了乙苯的谱图和响应曲线。在体积分数为1.3×10^(-6)的乙苯环境中,该传感器的响应时间为0.74 s,恢复时间为0.55 s,表现出快速、可重复性和高稳定性的响应特性。此外,分别探讨了相对湿度、乙苯体积分数(0.033×10^(-6)~1×10^(-6))与信号强度之间的关系。实验结果表明,信号强度随着相对湿度的增加而降低,并与气体体积分数呈现良好的线性关系,拟合线性系数达到98.8%。FAIMS气体传感器对乙苯的检测限为0.034×10^(-6),展现出高灵敏度和优异的检测性能。
A glass-based high-field asymmetric-waveform ion mobility spectroscopy(FAIMS)analyzer structure based on through glass via(TGV)vertical lead was proposed.A miniaturized and low-noise FAIMS gas sensor was developed,and its environmental noise shielding and gas detection performance were tested.The research results show that through the shielding electrode design of the vertical lead,the detection baseline noise of the sensor is as low as 16 fA,and it has good noise shielding performance.The typical volatile organic compound ethylbenzene was selected as the test sample,the response characteristics of the FAIMS gas sensor were evaluated,and the spectra and response curve of ethylbenzene were obtained.In the ethylbenzene environment with a volume fraction of 1.3×10^(-6),the response time of the sensor is 0.74 s and the recovery time is 0.55 s,showing fast,repeatable and highly stable response characteristics.In addition,the relationship between relative humidity,ethylbenzene volume fraction(0.033×10^(-6)-1×10^(-6))and signal intensity were explored.The experimental results show that the signal intensity decreases with increasing relative humidity and shows a good linear correlation with the gas volume fraction,with a fitting linear coefficient of 98.8%.The detection limit of the FAIMS gas sensor for ethylbenzene is 0.034×10^(-6),showing high sensitivity and excellent detection performance.
作者
胡郑蕊
李山
刘少敏
刘友江
王晗
徐椿景
魏健辉
陈池来
Hu Zhengrui;Li Shan;Liu Shaomin;Liu Youjiang;Wang Han;Xu Chunjing;Wei Jianhui;Chen Chilai(University of Science and Technology of China,Hefei 230026,China;Institute of Intelligent Machines,Hefei Institutes of Physical Science,Chinese Academy of Sciences,Hefei 230031,China)
出处
《微纳电子技术》
2025年第6期76-82,共7页
Micronanoelectronic Technology
基金
国家重点研发计划(2021YFC2800301)
安徽省重点研发计划(202304a05020061)。
