摘要
通过有限元仿真分析,研究了压敏电阻排布对压力传感器输出特性的影响。使用COMSOL软件对传感器芯片进行了力电耦合分析,重点对比了在相同形状的膜片上将压敏电阻位置按常规排布和经过改进后排布时的输出特性差异,同时对比了不同形状膜片(方形膜、圆形膜、E型膜)上压敏电阻位置优化的趋势及其对输出特性的改善效果。通过对比分析发现,压敏电阻位置的优化能够显著提高传感器的输出电压和灵敏度,最小提升达到29.07%,最大提升可达到45.92%。此外,仿真结果还表明,压敏电阻位置的优化趋势普遍指向应力集中区域,特别是膜片的边缘和固支连接处,将压敏电阻布置于应力集中的区域能够显著改善传感器的响应性能。这项研究为进一步提升压力传感器的输出特性提供了理论依据和设计参考。
The effect of piezoresistor arrangement on the output characteristics of pressure sensors was investigated through finite element simulation analysis.The force-electric coupling analysis of the sensor chip was carried out by using COMSOL software,focusing on comparing differences of output characteristics between the same shape diaphragm with conventional and optimized piezoresistor arrangement.And the trend of optimizing the position of piezoresistors in different shapes of diaphragms(square,round and E-type)and its effect on the improvement of the output characteristics were compared.The comparative analysis reveals that the optimization of the piezoresistor position can significantly improve the output voltage and sensitivity of the sensors,with a minimum improvement of 29.07%and a maximum improvement of 45.92%.In addition,the simulation results also show that the optimization of the piezoresistor position generally tends to be directed to the stress-concentrated area,especially at the edge of the diaphragm and the solid support connection,arranging piezoresistors in the stress-concentrated area can significantly improve the response performance of the sensor.This study provides a theoretical basis and design reference for further improving the output characteristics of pressure sensors.
作者
王旦旦
雷程
闫施锦
冀鹏飞
梁庭
Wang Dandan;Lei Cheng;Yan Shijin;Ji Pengfei;Liang Ting(State Key Laboratory of Extreme Environment Optoelectronic Dynamic Measurement Technology and Instrument,North University of China,Taiyuan 030051,China)
出处
《微纳电子技术》
2025年第6期60-67,共8页
Micronanoelectronic Technology
基金
国家重点研发计划(2023YFB3209100)
山西省科技重大专项“揭榜挂帅”(202301030201003)。
关键词
压敏电阻
压力传感器
力电耦合
膜片形状
输出电压
应力集中区
piezoresistor
pressure sensor
force-electric coupling
diaphragm shape
output voltage
stress-concentrated area
