摘要
电子级氢氟酸主要应用于太阳能光伏电池、集成电路和超大规模集成电路芯片的清洗及蚀刻领域,是电子信息行业生产所需的关键基础化工原料之一。介绍了电子级氢氟酸发展现状、质量标准、生产工艺以及生产过程中的难点,和对我国电子级氢氟酸的发展前景进行了展望。
Electronic grade hydrofluoric acid is mainly used in the field of solar photovoltaic cells,integrated circuits and ultra-large scale integrated circuit chips cleaning and etching,is one of the key basic chemical raw materials required for the production of electronic information industry.In this paper,the development status,quality standard,production technology and difficulties in the production process of electronic grade hydrofluoric acid are introduced,and the development prospect of electronic grade hydrofluoric acid in China is prospected.
作者
王雪梅
彭飞
WANG Xuemei;PENG Fei(Hubei SUNLIT Electronic Materials Co.,Ltd.,Yichang 443007,China)
出处
《山东化工》
2025年第2期41-43,共3页
Shandong Chemical Industry
关键词
电子级氢氟酸
电子化学品
质量标准
生产工艺
electronic grade hydrofluoric acid
electronic chemicals
quality standards
production technology
