摘要
简述振镜扫描和掩模激光标刻系统的特点 ,对比了二者的优缺点。提出了掩模激光标刻系统中图形模板的制作新方案及扫描方式 ,并对其进行了探讨 。
The Characteristic of scanning mirror marking and mask marking technology is discussed in this paper,the superior and inferior is showed separately too.A new method in making marking mask and scanning method is suggested,the conclusion is given on the basis of discussion.
出处
《激光杂志》
CAS
CSCD
北大核心
2002年第6期57-58,共2页
Laser Journal
