摘要
该文提出用特征X射线的发射(表层特征谱线照射量率法)或吸收(底层特征谱线吸收法)来测定薄层或涂层的厚度。并根据大量的实验数据和理论分析,确立了正确选择工作条件及确定方法适用范围的依据。实践证明了方法的可靠性和实用性。
It is important for quality of production, to measure the thickness of layers or plating layers. Recently, many methods have been used to measure the thickness. XRF method has some advantages. This paper discusses measurement of thicknss with XRF method both in theory and practice. The selection of measurement condition is presented. Besides, some data proving the suitability and reliability of XRF in measurement of thickness is listed.
关键词
工件
薄层
镀层
涂层
厚度
荧光法
measurement of thickness
layet
plating layer
XRF method
